About the company
Flexible reactor systems for WBG semiconductors (SiC/GaN/AlN etc)
Epiluvac is a privately held Swedish company founded 2013 by a team of engineers with decades of research and development experience from the CVD reactor field and especially hot-wall CVD SiC epitaxy equipment. The company offers CVD reactors and process chambers for high purity and high temperatures with customized gas mixing systems. Applications include epitaxy and bulk growth of WBG semiconductors like silicon carbide (SiC) and gallium nitride (GaN) but also graphene and nanowire manufacturing. Epiluvac provides standard as well as customized reactor solutions and a wide range of service and maintenance packages.
Epiluvac products are normally delivered as complete systems including reactor module, gas delivery system, process control, safety system, installation, and commissioning. Each system is tested extensively before shipment, and once installed the delivery also includes all necessary customer trainings for operation and maintenance.
2018-08-23 Epiluvac will exhibit at ECSCRM 2018 (European Conference on Silicon Carbide and Related Materials) which takes place at the International Convention Centre, Birmingham, UK during September 2-6. See https://warwick.ac.uk/fac/sci/eng/ecscrm2018/ for further information.
2018-08-17 We are pleased to inform that SweGaN AB, our partner in the Swedish Centre for III-nitride technology (C3NiT), has announced a newly developed GaN-on-SiC HEMT heterostructure QuanFINE™, with reported excellent characteristics. See https://swegan.se/news.html for more information
Chemical Vapor Deposition Solutions (CVD/MOCVD), WBG semiconductors, Silicon Carbide (SiC), Gallium Nitride (GaN), Nanowire, Graphene, Thin Film, High Purity Gas Solutions, High temperature, PVT, Sublimation, Crystal growth, Epitaxy