Epiluvac will be there so come and learn about our 200 mm CVD epitaxy systems for Silicon Carbide and Gallium Nitride. This is the new generation of CVD systems, designed from the beginning for 150 and 200 mm wafers. Two or more chambers can be connected and work together with optimized chemistry for different process steps.

ECSCRM brings together scientists, experts, engineers, and students from all over the world to meet and discuss silicon carbide (SiC) and other wide bandgap (WBG) semiconductors.


For more information about the event, see https://www.ecscrm-2020.com/