Our systems enable SiC and GaN of highest quality
Electricity is increasingly becoming the foundation for clean, efficient and fossil-free energy and transportation systems. Controlling and converting it is made by power electronics based on semiconductor materials. Silicon has since decades far been the dominating semiconductor material, but alternative semiconductors like Silicon Carbide (SiC) and Gallium Nitride (GaN), both so called wide bandgap (WBG) semiconductors, are now in an ever higher pace replacing Silicon due to their ability to enable lighter, smaller and more efficient power converter systems.
We, Epiluvac
…provide equipment to manufacture these excellent WBG semiconductor materials. Our main products are deposition systems for epitaxial growth of SiC and GaN by Chemical Vapor Deposition (CVD) and crystal growth systems for SiC. Decades of experience enable us to offer highest possible performance in terms of quality and yield, while keeping operational costs at a minimum.
Our specialities
- Chemical Vapor Deposition Solutions (CVD/MOCVD)
- WBG semiconductors
- Silicon Carbide (SiC)
- Gallium Nitride (GaN)
- Nanowire, Graphene, Thin film, High-purity gas solutions, High temperature, PVT, Sublimation, Crystal growth, Epitaxy
Epiluvac supplies ground-breaking CVD reactors
Epiluvac has received the first order for two new Chemical Vapor Deposition (CVD) systems in a...
Epiluvac welcomes Dr. Rolf Elmér as Chairman of the Board
Dr. Elmér has extensive experience from senior management and board positions in growing tech...
C3NiT Centre Day
The latest research developments in the Swedish Centre for III-Nitride Technology were presented...
ICSCRM 2019 in Kyoto – More than 1.000 participants!
It was five days with exciting presentations and great networking. Thanks to all of you who...
Our Products
Epiluvac products are normally delivered as complete systems including reactor module, gas delivery system, process control, safety system, installation, and commissioning. Each system is tested extensively before shipment, and once installed the delivery also includes all necessary customer trainings for operation and maintenance.
News
ECSCRM 2020-2021 in Tours, France, October 24-28
Our 200 mm CVD epitaxy systems for Silicon Carbide and Gallium Nitride got a lot of attention. This is the new generation of CVD systems, designed from the beginning for 150 and 200 mm wafers. Thanks to all of you who stopped and watched the video, showing the...
Epiluvac appoints Dr Michael MacMillan as Vice President, Sales and Marketing
Epiluvac AB, the Swedish manufacturer of CVD equipment for wide-bandgap semiconductors, today announced that Dr Michael MacMillan has joined the company as Vice President of Sales and Marketing. Dr MacMillan will be responsible for Epiluvac’s global sales and...
Epiluvac supplies ground-breaking CVD reactors
Epiluvac has received the first order for two new Chemical Vapor Deposition (CVD) systems in a double configuration. The systems will be used by Lukasiewicz Research Network - Institute of Microelectronics and Photonics in Warsaw, Poland. This institute is one of the...