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Meet us at ICSCRM 2019 in Kyoto, Japan Sept. 29 to Oct. 4!

Meet us at ICSCRM 2019 in Kyoto, Japan Sept. 29 to Oct. 4!

Epiluvac will be there so come and learn about our CVD epitaxy reactors for Silicon Carbide up to 200 mm (8″) wafers. You’ll find us in booth F5. ICSCRM brings together scientists, experts, engineers, and students from all over the world to meet and discuss silicon carbide (SiC) and other wide bandgap (WBG) semiconductors.

For more information about the event, see

Welcome to our new website

To better reflect our activities and offering we have made a total overhaul of our website and hope that visitors will find it informative. It has been adapted to work on all common platforms, but we welcome suggestions for improvement.

Epiluvac is a privately held Swedish company founded 2013 by a team of engineers with decades of research and development experience from the CVD reactor field and especially hot-wall CVD epitaxy equipment for Silicon Carbide. Epiluvac provides standard as well as customized reactor solutions and a wide range of service and maintenance packages. Recent customized solutions include reactor designs for graphene and nanowire manufacturing among others.