News and links

What is up at Epiluvac:

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Meet us at SEDEX 2022 in Seoul, South Korea, 5-7 October!

With estimated 60 000 visitors and 900 exhibitors, the SEDEX exhibition in Seoul attracts all sectors of the semiconductor industry. Epiluvac will be there in the large Swedish pavilion, together with other Swedish high-tech companies. This is an initiative by Business Sweden, and Epiluvac was selected among many companies to be part of the delegation.

For more information about the event, see

Meet us at ICSCRM 2022 in Davos, Switzerland, 11 – 16 September!

Epiluvac will be there so come and find out more about our CVD epitaxy reactors for Silicon Carbide up to 200 mm (8″) wafers. You’ll find us in booth M020 at level 3. ICSCRM brings together scientists, experts, engineers, and students from all over the world to meet and discuss silicon carbide (SiC) and other wide bandgap (WBG) semiconductors.

For more information about the event, see

Successful evaluation of C3NiT Competence Center

The Centre for III-nitride technology (C3NiT), of which Epiluvac is a key member, has been successfully exploiting cutting-edge research for next generation, power, and high frequency electronics for the last 5 years. In recognition of this success, Vinnova, the Swedish Innovation Agency, has agreed to support C3NiT with funding for an additional 5 years. Epiluvac will remain an important part of this ongoing endeavor.  

Collaboration with India

The Swedish Energy Agency is together with Business Sweden promoting a long-term collaboration with India related to Green Energy. Epiluvac is selected as one Swedish representative and this week a series of meetings are held in Delhi.

Epiluvac appoints Mr Per-Anders Eriksson as new CEO

Epiluvac AB today announced that Mr Per-Anders Eriksson has joined the company as Chief Executive Officer. Mr Eriksson is coming from Hexatronic US, Inc., where he has been the CEO for the last 5 years and led the successful establishment of the company. He will be based at the company’s head office in Lund, Sweden.

Download the full press release here.

ECSCRM 2020-2021 in Tours, France, October 24-28

Our 200 mm CVD epitaxy systems for Silicon Carbide and Gallium Nitride got a lot of attention. This is the new generation of CVD systems, designed from the beginning for 150 and 200 mm wafers. Thanks to all of you who stopped and watched the video, showing the automated wafer handler and the hot-wall process chamber.

The unique heater design, enabling a very precise temperature control of the wafer, and the patented gas injector was the starting point for many interesting discussions.

ECSCRM brings together scientists, experts, engineers, and students from all over the world to meet and discuss silicon carbide (SiC) and other wide bandgap (WBG) semiconductors.

(Updated October 30)

Epiluvac appoints Dr Michael MacMillan as Vice President, Sales and Marketing

Epiluvac AB, the Swedish manufacturer of CVD equipment for wide-bandgap semiconductors, today announced that Dr Michael MacMillan has joined the company as Vice President of Sales and Marketing. Dr MacMillan will be responsible for Epiluvac’s global sales and marketing, and will be based at the company’s new office in Orange County, CA, USA.

Download the full press release here.

Epiluvac supplies ground-breaking CVD reactors

Epiluvac has received the first order for two new Chemical Vapor Deposition (CVD) systems in a double configuration. The systems will be used by Lukasiewicz Research Network – Institute of Microelectronics and Photonics in Warsaw, Poland. This institute is one of the world leading research facilities for advanced semiconductors. The CVD-systems are designed with Epiluvac ER3 reactors for 8-inch wafers epitaxy of silicon carbide (SiC) and gallium nitride (GaN). They are intended to be used for R&D in new materials technology.

Download the full press release here.

Epiluvac welcomes Dr. Rolf Elmér as Chairman of the Board

Dr. Elmér has extensive experience from senior management and board positions in growing tech companies. This experience is essential for Epiluvac when moving in to the next phase of international scale-up. First steps for the new board is to create a solid growth plan for the coming years and then prepare for a capital injection to be able to meet the rapidly growing market demand of systems for new smart materials.

– Epiluvac is at the forefront of the greentech revolution within solid state technology and their new systems makes it possible to move rapidly to new smart WBG materials like silicon carbide #SiC and gallium nitride #GaN in the power, automotive and telecom industries, says Dr. Rolf Elmér, and I am looking forward to work with this exciting technology company which is at a pivotal moment in its development.

Dr. Elmér holds a PhD in Physics from Lund University and a MBA from Stockholm School of Economics.


Read & learn more:

Videos and slides from CUSP™
Wide Band Gap (WBG) Devices

  • 28 videos covering different topics including lecture slides.

The Journal of Physical Chemistry C
CVD Modeling

  • Extensive presentation of CVD modeling with new findings regarding the growth chemistry.

Journal of Vacuum Science & Technology A
Surface ligand removal in atomic layer deposition of GaN using triethylgallium

  • Presentation of new findings regarding the ALD growth of GaN.