Our systems enable SiC and GaN of highest quality

Electricity is increasingly becoming the foundation for clean, efficient and fossil-free energy and transportation systems. Controlling and converting it is made by power electronics based on semiconductor materials. Silicon has since decades far been the dominating semiconductor material, but alternative semiconductors like Silicon Carbide (SiC) and Gallium Nitride (GaN), both so called wide bandgap (WBG) semiconductors, are now in an ever higher pace replacing Silicon due to their ability to enable lighter, smaller and more efficient power converter systems.

We, Epiluvac

…provide equipment to manufacture these excellent WBG semiconductor materials. Our main products are deposition systems for epitaxial growth of SiC and GaN by Chemical Vapor Deposition (CVD) and crystal growth systems for SiC. Decades of experience enable us to offer highest possible performance in terms of quality and yield, while keeping operational costs at a minimum.

Our specialities

  • Chemical Vapor Deposition Solutions (CVD/MOCVD)
  • WBG semiconductors
  • Silicon Carbide (SiC)
  • Gallium Nitride (GaN)
  • Nanowire, Graphene, Thin film, High-purity gas solutions, High temperature, PVT, Sublimation, Crystal growth, Epitaxy

Collaboration with India

The Swedish Energy Agency is together with Business Sweden promoting a long-term collaboration...

Our Products

Epiluvac products are normally delivered as complete systems including reactor module, gas delivery system, process control, safety system, installation, and commissioning. Each system is tested extensively before shipment, and once installed the delivery also includes all necessary customer trainings for operation and maintenance.


Meet us at SEDEX 2022 in Seoul, South Korea, 5-7 October!

With estimated 60 000 visitors and 900 exhibitors, the SEDEX exhibition in Seoul attracts all sectors of the semiconductor industry. Epiluvac will be there in the large Swedish pavilion, together with other Swedish high-tech companies. This is an initiative by...

Meet us at ICSCRM 2022 in Davos, Switzerland, 11 – 16 September!

Epiluvac will be there so come and find out more about our CVD epitaxy reactors for Silicon Carbide up to 200 mm (8″) wafers. You’ll find us in booth M020 at level 3. ICSCRM brings together scientists, experts, engineers, and students from all over the world to meet...

Successful evaluation of C3NiT Competence Center

The Centre for III-nitride technology (C3NiT), of which Epiluvac is a key member, has been successfully exploiting cutting-edge research for next generation, power, and high frequency electronics for the last 5 years. In recognition of this success, Vinnova, the...