SiC - Epiluvac

is now

Our systems enable SiC and GaN of highest quality

Electricity is increasingly becoming the foundation for clean, efficient and fossil-free energy and transportation systems. Controlling and converting it is made by power electronics based on semiconductor materials. Silicon has since decades far been the dominating semiconductor material, but alternative semiconductors like Silicon Carbide (SiC) and Gallium Nitride (GaN), both so called wide bandgap (WBG) semiconductors, are now in an ever higher pace replacing Silicon due to their ability to enable lighter, smaller and more efficient power converter systems.

We, Epiluvac

…provide equipment to manufacture these excellent WBG semiconductor materials. Our main products are deposition systems for epitaxial growth of SiC and GaN by Chemical Vapor Deposition (CVD) and crystal growth systems for SiC. Decades of experience enable us to offer highest possible performance in terms of quality and yield, while keeping operational costs at a minimum.

Why us?

Our specialities

  • Chemical Vapor Deposition Solutions (CVD/MOCVD)
  • WBG semiconductors
  • Silicon Carbide (SiC)
  • Gallium Nitride (GaN)
  • Nanowire, Graphene, Thin film, High-purity gas solutions, High temperature, PVT, Sublimation, Crystal growth, Epitaxy
About our technology

Our Products

Epiluvac products are normally delivered as complete systems including reactor module, gas delivery system, process control, safety system, installation, and commissioning. Each system is tested extensively before shipment, and once installed the delivery also includes all necessary customer trainings for operation and maintenance.

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