Say Hello to the New Generation
of Wide Bandgap CVD Systems
The ER3 CVD systems are from the beginning designed for 200 mm wafers. They have a unique hot-wall design to optimize temperature homogeneity, a patented gas flow injector for optimum growth rate and doping uniformity as well as hot load of pre-heated wafers.
This is the new generation of wide bandgap CVD reactors.
Meet us at SEDEX 2022 in Seoul, South Korea, 5-7 October!
With estimated 60 000 visitors and 900 exhibitors, the SEDEX exhibition in Seoul attracts all...
Meet us at ICSCRM 2022 in Davos, Switzerland, 11 – 16 September!
Epiluvac will be there so come and find out more about our CVD epitaxy reactors for Silicon...
Successful evaluation of C3NiT Competence Center
The Centre for III-nitride technology (C3NiT), of which Epiluvac is a key member, has been...
Collaboration with India
The Swedish Energy Agency is together with Business Sweden promoting a long-term collaboration...
News
Meet us at SEDEX 2022 in Seoul, South Korea, 5-7 October!
With estimated 60 000 visitors and 900 exhibitors, the SEDEX exhibition in Seoul attracts all sectors of the semiconductor industry. Epiluvac will be there in the large Swedish pavilion, together with other Swedish high-tech companies. This is an initiative by...
Meet us at ICSCRM 2022 in Davos, Switzerland, 11 – 16 September!
Epiluvac will be there so come and find out more about our CVD epitaxy reactors for Silicon Carbide up to 200 mm (8″) wafers. You’ll find us in booth M020 at level 3. ICSCRM brings together scientists, experts, engineers, and students from all over the world to meet...
Successful evaluation of C3NiT Competence Center
The Centre for III-nitride technology (C3NiT), of which Epiluvac is a key member, has been successfully exploiting cutting-edge research for next generation, power, and high frequency electronics for the last 5 years. In recognition of this success, Vinnova, the...