Our systems enable SiC and GaN of highest quality
Electricity is increasingly becoming the foundation for clean, efficient and fossil-free energy and transportation systems. Controlling and converting it is made by power electronics based on semiconductor materials. Silicon has since decades far been the dominating semiconductor material, but alternative semiconductors like Silicon Carbide (SiC) and Gallium Nitride (GaN), both so called wide bandgap (WBG) semiconductors, are now in an ever higher pace replacing Silicon due to their ability to enable lighter, smaller and more efficient power converter systems.
…provide equipment to manufacture these excellent WBG semiconductor materials. Our main products are deposition systems for epitaxial growth of SiC and GaN by Chemical Vapor Deposition (CVD) and crystal growth systems for SiC. Decades of experience enable us to offer highest possible performance in terms of quality and yield, while keeping operational costs at a minimum.
- Chemical Vapor Deposition Solutions (CVD/MOCVD)
- WBG semiconductors
- Silicon Carbide (SiC)
- Gallium Nitride (GaN)
- Nanowire, Graphene, Thin film, High-purity gas solutions, High temperature, PVT, Sublimation, Crystal growth, Epitaxy
Epiluvac products are normally delivered as complete systems including reactor module, gas delivery system, process control, safety system, installation, and commissioning. Each system is tested extensively before shipment, and once installed the delivery also includes all necessary customer trainings for operation and maintenance.
Epiluvac will be there so come and learn about our CVD epitaxy reactors for Silicon Carbide up to 200 mm (8") wafers. You’ll find us in booth F5. ICSCRM brings together scientists, experts, engineers, and students from all over the world to meet and discuss silicon...
To better reflect our activities and offering we have made a total overhaul of our website and hope that visitors will find it informative. It has been adapted to work on all common platforms, but we welcome suggestions for improvement.
Epiluvac is a privately held Swedish company founded 2013 by a team of engineers with decades of research and development experience from the CVD reactor field and especially hot-wall CVD epitaxy equipment for Silicon Carbide. Epiluvac provides standard as well as customized reactor solutions and a wide range of service and maintenance packages. Recent customized solutions include reactor designs for graphene and nanowire manufacturing among others.
Epiluvac will be there so come and learn about our CVD epitaxy reactors for Silicon Carbide up to...
To better reflect our activities and offering we have made a total overhaul of our website and...